High-End Coating Technology for Sensor Production

In our everyday lives, sensors are playing a more and more important role – whether it be in smartphones, in the future car or for the evolving digitalization. Sensor technology is rapidly developing and changing. The challenges in the industry are clear: higher precision of coatings on larger substrates at lower costs. Bühler Leybold Optics, a specialist in the development of vacuum thin-film coating machines, successfully developed a new high-end technology for the production of sensors in the Highly Integrated Optical Sensors (HIOS) project.

Leybold Optics Helios Series 800 (Source: Bühler)

Over the past three years, Bühler Leybold Optics further developed its Helios technology. The existing Helios 800 system was upgraded to the Helios 800 Generation II. This new generation enables coatings with almost zero particle contamination in the coating results for 200-mm wafers. On top, the company has developed its new Helios 1200 system which allows significantly higher throughput and coatings of larger substrates up to 300-mm wafers. The new developments enable Bühler Leybold Optics to respond to changing market needs and to strengthen its position as innovator in the vacuum thin-film technology.

The developments were executed in the HIOS consortium as part of the EU-funded Horizon-2020 grant agreement 720531. As the project achieved excellent results in terms of quality of the interference filters, the technology is now being implemented in new spectral color sensors for applications with UV, visible and infrared wavelengths. Bühler Leybold Optics would like to thank all partners for the good collaboration, highlighting AMS, a leading Austrian high-tech company for optical sensor solutions, for coordinating the project. Leybold Optics Helios Series 800 (Source: Bühler)

Links: Fast Track to Innovation – Highly Integrated Optical Sensors (HIOS) project c/o ams AGPrecision optics vacuum coater – HELIOS series, Bühler Leybold Optics GmbH, Alzenau, Germany / Bühler AG, Uzwil, Switzerland

Further reading: Sensors Project for Wearables, Consumer Products Concluded, photonocsviews.com, 21st November 2019

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