Precision Miniature Hexapod

Parallel-kinematic hexapod “811.I2” with six degrees of freedom for positioning in a compact space and work, optimized for high throughput and a long lifetime. The new model is an optimized version of the proven “H-811” miniature hexapod.

Parallel-kinematic hexapods work with considerably more precision than is possible with serial, stacked systems. The new filigree hexapod has the same installation space as before, positions with velocities up to 20 mm/s, and is therefore twice as fast as its predecessor. Its six struts work with a resolution of 5 nm thus allowing a high repeatability of ±0.06 µm. The hexapod covers travel ranges up to 17 mm (in the X and Y axis) or 6.5 mm (in the Z axis). Its long lifetime is about 20 million motion cycles. Loads up to 5 kg can be positioned quickly, with high precision, and over long operating times. Vacuum-compatible versions are also available.

Brushless DC motors are the driving force of the miniature hexapods. They are particularly suitable for high rotation speeds, can be controlled very accurately, and allow high precision. Dispensing with sliding contacts also makes them long lived, allows them to run smoothly with very low wear. PI controllers control the hexapods. It is also possible to use Cartesian coordinates for convenient commanding of complex motion profiles. The hexapod controllers can also communicate via EtherCAT if a higher level controller is connected.

Various applications in industry and research include, for example, micro manufacturing, medicine technology, camera positioning for optical inspection or photonics.

Physik Instrumente (PI) GmbH & Co. KG
Auf der Römerstr. 1
76228 Karlsruhe, Germany
Phone: +49 (0)721 4846-0
Fax: +49 (0)721 4846-1019
info@pi.de
www.pi.de